Lithography and 3D Fabrication Processes: A Review

Abhishek Kumar1,#

Swapnendu Narayan Ghosh1,#

Santanu Talukder1,Email

Deepak Chopra2,Email

1Department of Electrical Engineering and Computer Science, Indian Institute of Science Education and Research, Bhopal 462066, Bhopal, Madhya Pradesh, India.
2Department of Chemistry, Indian Institute of Science Education and Research, Bhopal 462066, Bhopal, Madhya Pradesh, India.
#These authors contributed equally to this work.

 

Abstract

The present review provides in-depth insights of the various lithographic processes that are currently being used in academic and industrial research labs for fabricating various micro- and nano-scale devices. All the patterning techniques discussed in this review have their own unique set of characteristics and use-case depending on the design requirement of the devices that need to be fabricated. This has tremendous implications in the electronic industry.

Lithography and 3D Fabrication Processes: A Review