Spray Pyrolytic Deposition of Zirconium Oxide Thin Films: Influence of Concentration on Structural and Optical Properties

Mangesh Waghmare 1, 2

Pratik Sonone 1

Prashant Patil 3

Vishal Kadam 2

Habib Pathan 2

Ashok Ubale 1, Email

1 Nanostructured Thin Film Materials Laboratory, Department of Physics,Govt. Vidarbha Institute of Science and Humanities, Amravati - 444604, India

2 Advanced Physics Laboratory, Department of Physics, Savitribai Phule Pune University, Pune - 411007, India

3 Sinhgad Institute of Technology, Lonavala - 410401, India

Abstract

Zirconium oxide (ZrO2) thin films were deposited by spray pyrolysis technique using precursor solution of zirconyl chloride octahydrate (ZrOCl2.8H2O) on glass substrate at 450 oC. The effects of concentration of precursor solution on the structural and optical properties of ZrO2 films were investigated. The films were characterized by X- ray diffraction (XRD), Scanning electron microscopy (SEM), Energy-dispersive Xray spectroscopy (EDX), Transmission electron microscopy (TEM), UV-vis analysis and Fourier transform infrared (FT-IR) spectroscopy. The films were amorphous in nature at 0.025 M concentration and it was observed that crystallinity increases with increase in concentration of precursor solution. The crystalline films exhibited cubic zirconium oxide (c-ZrO2) phase. The surface morphology of the films was strongly influenced by the concentration of the precursor solution. The EDX study confirmed the existence of Zr and O. The TEM images showed nanosized as well as agglomerated ZrO2 particles with the average particle size < 20 nm. The well-crystallized cubic phase of the films was further enlightened by selected area electron diffraction patterns. The UV-vis study showed that the optical band gap values were decreased with decrease in concentration of precursor solution. The formation of zirconium oxide was further confirmed by FT-IR spectroscopy

Spray Pyrolytic Deposition of Zirconium Oxide Thin Films: Influence of Concentration on Structural and Optical Properties