Fabrication of Nano-Patterned Arrays Using Pulsed Light Technique

Ilwoo Seok 1, Email 

Aktaruzzaman Al-Hossain 2

Mohammad Waliullah 3

Jong Eun Ryu 4

1 Department of Mechanical Engineering, Arkansas State University, AR 72401, USA

2 Department of Mechanical Engineering, Stony Brook University, NY 11790, USA

3 Department of Mechanical Engineering, The University of Texas at Dallas, TX 75080, USA

4 Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC 27695, USA


Pulsed light aided thin film de-wetting process to fabricate nano-patterned array is introduced. Being compared to thermal annealing process, highly intense pulsed light with millisecond duration plays a role to transform solid-state thin-film to metastable and provides enough energy as a driving force to form island-like pattern. Topological analysis using SEM and AFM was performed to confirm fabricated structures. In addition, optical performance regarding surface-plasmon resonance and light absorption was studied by experimental UV-VIS spectroscopy and computer aided electromagnetics (EM) simulation. This research will benefit to the real-time roll-to-roll fabrication for the fabrication of nanostructures without using of thermal soaking and vacuum process.   

Fabrication of Nano-Patterned Arrays Using Pulsed Light Technique